High Performance and High Rangeability Next-Generation Flow Meters The CMS series is a next-generation mass flowmeter equipped with Yamatake's µF (Micro Flow) sensor, which can detect even the slightest gas flows. It combines the superb performance of the µF sensor not available before and Yamatake’s original rectification mechanism to realize high accuracy, high resolution, and high rangeability, at the cost of a conventional float type flowmeter. Available in a range of functions, the CMS series employs a unique method of measuring gas flow rate that is also resistant to changes in temperature and pres

High rangeability with ±3%RD accuracy. (* Standard Model only) "standard" indicates the volume flow per minute converted to the conditions of 20°C and 1 atmospheric pressure. Structure and features of µF (Micro Flow) sensor •Manufactured by silicon micro-machining and thin-film technologies, this thermal type flow sensor is a mere 1.7mm (squared) and 0.5mm thickness. •The use of ultra-precision machining technology minimizes variations in element layout and thermal capacity. High resolution of 1 mm/s in flow speed and high-speed response of approx. 2ms are achieved at the sensor chip level. [Principle...

Solutions to a range of application needs... Need: A low cost and high accuracy / resolution mass flowmeter The CMS series is equipped with a Micro Flow sensor to offer high accuracy of ±3% RD, repeatability of 0.5% FS and wide rangeability of 100:1, all at low cost. Need: A mass flowmeter with a variety of functions The CMS series offers a variety of functions, such as instantaneous /integratred flow rate indication, analog output, integrated pulse output, event output (2 points) and analog output scaling function and RS-485 communications. Analog output Need: A suitable model A broad selection...

CMSSeries Specifications

External Dimensions CMS1500 (Aluminum model) Massflow CMS Micro Flow (Dust seal) Threaded hole for body installation M3 with thread depth 4 (2) M5 with min. thread depth 10 (4) CMS9500/0002/0005/0020/0050 (SUS model and SUS316 model) SUS model Rc 1/4" connection type (option) TOKYO JAPAN Threaded hole for body installationM4 with thread depth 5 (4) 1/4" Swagelok connection type (option) (21.5) Swagelok joint (2) SS-400-1-6STSC11 Applicable pipe: outer dia. 1/4" Material SUS316 1/4" VCR connection type (option) CMS0200 (SUS model and SUS316 model) SUS model SUS 316 model Massflow CMS EV1 EV2 DISP...

CMSSeries External Dimensions CMS0500 (SUS model and SUS316 model) SUS model 3/4-16UNF connection type (standard) M5 with thread depth 8 (4) Threaded hole for body installation 1/2" Swagelok joint (2) （30.7） SS-810-1-8STSC11 1/2" Swagelok connection type (option) Applicable pipe: outer dia. 1/2" Material SUS316 Rc 1/2" connection type (option) 3/8" VCR Swagelok joint (2) SS-8-VCR-1-8STSC11 or equivalent model Material SUS316 3/8" VCR connection type (option) 1/4" Swagelok connection type (option) 3/4-16UNF connection type (standard) Rc 1/2" connection type (option) Swagelok joint (2) SS-400-1-6STSC11...

Selection guide Optional parts (sold separately) CAUTION The product has been designed, developed and manufactured for general purpose applications for machinery and equipment. The product shall be handled with extra caution to provide fail-safe and/or redundant design in the applications that require strict safety as those listed below. ¥ applications pertaining to the protection of human life ¥ applications pertaining directly to controlling transportation equipment and machinery (start/stop control, etc.) ¥ applications pertaining to aircraft ¥ applications pertaining to spacecraft ¥ applications...